Heat treatment apparatus emitting flash of light
View Patent ↗Flash lamps connected to short-pulse circuits and flash lamps connected to long-pulse circuits are alternately arranged in a line. The duration of light emission from the flash lamps connected to the long-pulse circuits is longer than the duration of light emission from the flash lamps connected to the short-pulse circuits. A superimposing of a flash of light with a high peak intensity from the flash lamps that emit light for a short time and a flash of light with a gentle peak from the flash lamps that emit light for a long time can increase the temperature of even a deep portion of a substrate to an activation temperature or more without heating a shallow portion near the substrate surface more than necessary. This achieves the activation of deep junctions without causing substrate warpage or cracking.
1. A heat treatment method irradiating a substrate with flashes of light from flash lamps to heat the substrate, comprising:
(a) a first irradiation step of irradiating said substrate with a flash of light of a first pulse, said first irradiation step is started at a first time; and
(b) a second irradiation step of irradiating said substrate with a flash of light of a second pulse, said second irradiation step is started at a second time later than said first time;
wherein,
at least a part of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step, and
the surface temperature of said substrate is increased to a treatment temperature of a predetermined value by the irradiation of the flash of light of said first irradiation step, and the surface temperature of said substrate is maintained at said treatment temperature equal to said predetermined value for not less than a predetermined duration of time by the irradiation of the flash of light of said second irradiation step.
2. A heat treatment method irradiating a substrate with flashes of light to heat the substrate, comprising:
(a) a first irradiation step of irradiating said substrate with a flash of light from a first flash lamp, said first irradiation step is started at a first time; and
(b) a second irradiation step of irradiating said substrate with a flash of light from a second flash lamp, said second irradiation step is started at a second time later than said first time;
wherein,
at least a part of the irradiation of a flash of light of said second irradiation step is superimposed on the irradiation of a flash of light of said first irradiation step, and
the surface temperature of said substrate is increased to a treatment temperature of a predetermined value by the irradiation of the flash of light of said first irradiation step, and the surface temperature of said substrate is maintained at said treatment temperature equal to said predetermined value for not less than a predetermined duration of time by the irradiation of the flash of light of said second irradiation step.