Substrate processing apparatus
View Patent ↗A substrate processing apparatus of the present invention is to apply processing using a processing liquid to a substrate. The substrate processing apparatus includes a first-side plate disposed oppositely to a first surface of the substrate with a distance and provided with plural discharge ports and suction ports in a surface opposing the first surface, a first-side processing liquid supply mechanism that supplies a processing liquid to the discharge ports in the first-side plate, and a first-side suction mechanism that sucks insides of the suction ports in the first-side plate.
1. A substrate processing apparatus that applies processing using a processing liquid to a substrate, comprising:
a first-side plate disposed oppositely to a first surface of the substrate with a distance and provided with plural discharge ports and suction ports in a surface opposing the first surface;
a first-side processing liquid supply mechanism that supplies a processing liquid to the discharge ports in the first-side plate;
a first-side suction mechanism that sucks insides of the suction ports in the first-side plate;
a second-side plate disposed oppositely to a second surface of the substrate on an opposite side of the first surface with a distance and provided with plural discharge ports and suction ports in a surface opposing the second surface;
a second-side processing liquid supply mechanism that supplies the processing liquid to the discharge ports in the second-side plate;
a second-side suction mechanism that sucks insides of the suction ports in the second-side plate; and
a second-side rotation driving mechanism that is coupled to the second-side plate and rotates the second-side plate about an axis line orthogonal to the surface of the second-side plate opposing the second surface of the substrate.
2. The substrate processing apparatus according to claim 1 , wherein
the first-side processing liquid supply mechanism supplies the discharge ports in the first-side plate with a chemical liquid as the processing liquid.
3. The substrate processing apparatus according to claim 2 , comprising
a first-side pure water supply mechanism that supplies pure water to the discharge ports in the first-side plate.
4. The substrate processing apparatus according to claim 3 , wherein
the discharge ports to which the pure water is supplied by the first-side pure water supply mechanism are common with the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
5. The substrate processing apparatus according to claim 3 , wherein
the discharge ports to which the pure water is supplied by the first-side pure water supply mechanism are different from the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
6. The substrate processing apparatus according to claim 3 , comprising
a first-side drying accelerator fluid supply mechanism that supplies the discharge ports in the first-side plate with a drying accelerator fluid that accelerates drying of the substrate.
7. The substrate processing apparatus according to claim 6 , wherein
the discharge ports to which the drying accelerator fluid is supplied by the first-side drying accelerator fluid supply mechanism are common with the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
8. The substrate processing apparatus according to claim 6 , wherein
the discharge ports to which the drying accelerator fluid is supplied by the first-side drying accelerator fluid supply mechanism are different from the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
9. The substrate processing apparatus according to claim 2 , comprising
a first-side gas supply mechanism that supplies an inert gas to the discharge ports in the first-side plate.
10. The substrate processing apparatus according to claim 9 , wherein
the discharge ports to which the inert gas is supplied by the first-side gas supply mechanism are common with the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
11. The substrate processing apparatus according to claim 9 , wherein
the discharge ports to which the inert gas is supplied by the first-side gas supply mechanism are different from the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
12. The substrate processing apparatus according to claim 1 , wherein
the first-side processing liquid supply mechanism supplies the discharge ports in the first-side plate with pure water as the processing liquid.
13. The substrate processing apparatus according to claim 12 , comprising
a first-side drying accelerator fluid supply mechanism that supplies the discharge ports in the first-side plate with a drying accelerator fluid that accelerates drying of the substrate.
14. The substrate processing apparatus according to claim 13 , wherein
the discharge ports to which the drying accelerator fluid is supplied by the first-side drying accelerator fluid supply mechanism are common with the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
15. The substrate processing apparatus according to claim 13 , wherein
the discharge ports to which the drying accelerator fluid is supplied by the first-side drying accelerator fluid supply mechanism are different from the discharge ports to which the processing liquid is supplied by the first-side processing liquid supply mechanism.
16. The substrate processing apparatus according to claim 1 , comprising
a first-side flow rate control mechanism that controls a flow rate of the processing liquid supplied to the discharge ports by the first-side processing liquid supply mechanism.
17. The substrate processing apparatus according to claim 1 , comprising
a second-side flow rate control mechanism that controls a flow rate of the processing liquid supplied to the discharge ports by the second-side processing liquid supply mechanism.
18. The substrate processing apparatus according to claim 1 , wherein
the second-side plate serves also as a substrate carrier mechanism that carries the substrate to a substrate processing position opposing the first-side plate.
19. The substrate processing apparatus according to claim 1 , comprising
a separation and approximation mechanism that allows the first-side plate and the second-side plate to come closer and move apart relatively to each other.
20. The substrate processing apparatus according to claim 1 , comprising
a sealing mechanism that seals a space between an outer edge portion of the first-side plate and an outer edge portion of the second-side plate.
21. The substrate processing apparatus according to claim 1 , wherein
the second-side plate is provided with channels connected to the discharge ports, and
connection portions of the channels to the discharge ports have tapered cross sections that widen toward the discharge ports.
22. The substrate processing apparatus according to claim 1 , wherein
the second-side plate is provided with channels connected to the discharge ports, and
the substrate processing apparatus comprises discharge pressure dispersing balls provided in connection portions of the channels to the discharge ports.
23. The substrate processing apparatus according to claim 1 , comprising
a first-side rotation driving mechanism that is coupled to the first-side plate and rotates the first-side plate about an axis line orthogonal to the surface of the first-side plate opposing the first surface of the substrate.
24. The substrate processing apparatus according to claim 1 , wherein
the first-side plate is provided with channels connected to the discharge ports, and
connected portions of the channels to the discharge ports have tapered cross sections that widen toward the discharge ports.
25. The substrate processing apparatus according to claim 1 , wherein
the first-side plate is provided with channels connected to the discharge ports, and
the substrate processing apparatus comprises discharge pressure dispersing balls provided in connection portions of the channels to the discharge ports.
26. The substrate processing apparatus according to claim 1 , wherein
the substrate has on the first surface a device forming region in which devices are formed.
27. The substrate processing apparatus according to claim 1 , wherein
the substrate has on the second surface opposite to the first surface a device forming region in which devices are formed.
28. The substrate processing apparatus according to claim 1 , comprising
a processing liquid reusing mechanism that allows the processing liquid sucked through the suction ports in the first-side plate by the first-side suction mechanism to be reused for processing a substrate by returning the processing liquid to supply channels of the processing liquid of the first-side processing liquid supply mechanism.
29. The substrate processing apparatus according to claim 1 , comprising
a substrate rotating mechanism that rotates the substrate on the first-side plate.
30. The substrate processing apparatus according to claim 1 , comprising
a substrate position moving mechanism that moves a position of the substrate on the first-side plate.
31. A substrate processing apparatus that applies processing using a processing liquid to a substrate, comprising:
a first-side plate disposed oppositely to a first surface of the substrate with a distance and provided with plural discharge ports and suction ports in a surface opposing the first surface;
a first-side processing liquid supply mechanism that supplies a processing liquid to the discharge ports in the first-side plate;
a first-side suction mechanism that sucks insides of the suction ports in the first-side plate;
a second-side plate disposed oppositely to a second surface of the substrate on an opposite side of the first surface with a distance and provided with plural discharge ports and suction ports in a surface opposing the second surface;
a second-side gas supply mechanism that supplies an inert gas to the discharge ports in the second-side plate;
a second-side suction mechanism that sucks insides of the suction ports in the second-side plate; and
a second-side rotation driving mechanism that is coupled to the second-side plate and rotates the second-side plate about an axis line orthogonal to the surface of the second-side plate opposing the second surface of the substrate.
32. The substrate processing apparatus according to claim 31 , wherein
the second-side plate serves also as a substrate carrier mechanism that carries the substrate to a substrate processing position opposing the first-side plate.
33. The substrate processing apparatus according to claim 31 , comprising
a separation and approximation mechanism that allows the first-side plate and the second-side plate to come closer and move apart relatively to each other.
34. The substrate processing apparatus according to claim 31 , comprising
a sealing mechanism that seals a space between an outer edge portion of the first-side plate and an outer edge portion of the second-side plate.
35. The substrate processing apparatus according to claim 31 , wherein
the second-side plate is provided with channels connected to the discharge ports, and
connection portions of the channels to the discharge ports have tapered cross sections that widen toward the discharge ports.
36. The substrate processing apparatus according to claim 31 , wherein
the second-side plate is provided with channels connected to the discharge ports, and
the substrate processing apparatus comprises discharge pressure dispersing balls provided in connection portions of the channels to the discharge ports.
37. The substrate processing apparatus according to claim 31 , comprising
a first-side rotation driving mechanism that is coupled to the first-side plate and rotates the first-side plate about an axis line orthogonal to the surface of the first-side plate opposing the first surface of the substrate.
38. The substrate processing apparatus according to claim 31 , wherein
the substrate has on the first surface a device forming region in which devices are formed.
39. The substrate processing apparatus according to claim 31 , wherein
the substrate has on the second surface opposite to the first surface a device forming region in which devices are formed.
40. The substrate processing apparatus according to claim 31 , comprising
a processing liquid reusing mechanism that allows the processing liquid sucked through the suction ports in the first-side plate by the first-side suction mechanism to be reused for processing a substrate by returning the processing liquid to supply channels of the processing liquid of the first-side processing liquid supply mechanism.