Patent Assignment
Reel/Frame 009255/0391
Assignment of Assignor's Interest
Recorded: 1998-06-17
Pages: 2
Assignee
SPEEDFAM CORPORATION
305 NORTH 54TH STREET, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Method and Apparatus for Improved Semiconductor Wafer Polishing
Patent:
5,993,293 →
Application:
09/098,774 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.