Patent Assignment
Reel/Frame 009780/0399
Assignment of Assignor's Interest
Recorded: 1999-02-12
Pages: 3
Assignors
ONO, TETSUO
Executed: 1999-02-04
MIZUTANI, TATSUMI
Executed: 1999-02-04
HAMASAKI, RYOUJI
Executed: 1999-02-04
KURE, TOKUO
Executed: 1999-02-04
TOKUNAGA, TAKAFUMI
Executed: 1999-02-04
KOJIMA, MASAYUKI
Executed: 1999-02-04
Assignee
HITACHI LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Treating Surface of Semiconductor