Patent Assignment
Reel/Frame 010837/0901
Assignment of Assignor's Interest
Recorded: 2000-05-23
Pages: 4
Assignee
SILICON VALLEY GROUP, INC.
101 METRO DRIVE, SUITE 400, SAN JOSE, CALIFORNIA, 95110
Covered Property
(1)
Apparatus and Method of Cleaning Reticles for Use in a Lithography Tool
Patent:
6,387,602 →
Application:
09/504,539 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.