Patent Assignment
Reel/Frame 011426/0453
Assignment of Assignor's Interest
Recorded: 2001-01-04
Received: 2001-01-18
Pages: 3
Assignor
LACY, MICHAEL S.
Executed: 2000-12-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Method and Apparatus for Conditioning a Polishing Pad with Sonic Energy
Application:
09/754,702 →