IP Library Patent Application 09754702
Patent Application Utility
App. No. 09/754,702 · Confirmation No. 2119

METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD WITH SONIC ENERGY

Inventor: Michael S. Lacy
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
⬇ PDF
Code Description Pages PDF
2008-01-17 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2001-01-04 TRNA Transmittal of New Application 1 View
2001-01-04 SPEC Specification 15 View
2001-01-04 CLM Claims 4 View
2001-01-04 ABST Abstract 1 View
2001-01-04 DRW Drawings-only black and white line drawings 3 View
2001-01-04 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
09/754,702
Filed
2001-01-04
Granted
2003-04-29
Pub. No.
US20020086620A1
Art Unit
3723
PTA
-35 days