Patent Assignment
Reel/Frame 011427/0872
Assignment of Assignor's Interest
Recorded: 2001-01-04
Received: 2001-01-18
Pages: 3
Assignor
UEDA, YASUHIKO
Executed: 2000-12-20
Assignee
NEC CORPORATION
MINATO-KU, 7-1, SHIBA 5-CHOME, TOKYO, JPX, JAPAN
Covered Property
(1)
Dry Etching Method and Method of Manufacturing Semiconductor Device
Application:
09/754,638 →