Granted Patent
Utility
US 6,562,721
· Confirmation No. 3610
DRY ETCHING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Inventor:
Yasuhiko Ueda
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-01-04 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-01-04 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-01-04 | SPEC |
Specification | 15 | View | |
| 2001-01-04 | CLM |
Claims | 4 | View | |
| 2001-01-04 | ABST |
Abstract | 1 | View | |
| 2001-01-04 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-01-04 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Yasuhiko Ueda
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/706
H10P50/283
Prosecution
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- Customer No.
- 26304
- Docket No.
- NEC 18.184
- Confirmation No.
- 3610
Foreign Priority
17685/2000
·
2000-01-26
·
JAPAN
Publication
- Pub. No.
- US20010016422A1
- Pub. Date
- 2001-08-23
Patent Term Adjustment
-57days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-19
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Quick Facts
- Patent No.
- US 6,562,721
- App. No.
- 09/754,638
- Filed
- 2001-01-04
- Granted
- 2003-05-13
- Pub. No.
- US20010016422A1
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- PTA
- -57 days
External Links