Patent Assignment
Reel/Frame 011448/0502
Assignment of Assignor's Interest
Recorded: 2001-01-09
Received: 2001-01-26
Pages: 2
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
ARMONK, NY, 10504, UNITED STATES
Covered Property
(1)
Method for Dry Etching Deep Trenches in a Substrate
Application:
09/757,123 →