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App. No. 09/757,123 · Confirmation No. 6586

METHOD FOR DRY ETCHING DEEP TRENCHES IN A SUBSTRATE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2004-10-26 BIB Bibliographic Data Sheet 1 View
2004-10-06 IFEE Issue Fee Payment (PTO-85B) 1 View
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2004-08-10 RUSH Printer Query form, used by the publications branch 2 View
2004-08-10 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-08-10 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-10 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-08-10 1449 List of References cited by applicant and considered by examiner 1 View
2004-07-07 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-07 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-07-07 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-07 SRFW Search information including classification, databases and other search related notes 1 View
2004-07-07 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-07-07 CLM Claims 7 View
2004-06-21 A.NE Response After Final Action 2 View
2004-06-21 CLM.NE Claim-Amendment Not Entered 7 View
2004-06-21 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-06-21 WFEE Fee Worksheet (SB06) 1 View
2004-06-21 FWCLM Index of Claims 1 View
2004-04-20 CTFR Final Rejection 5 View
2004-04-20 FWCLM Index of Claims 1 View
2004-03-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-03-08 CLM Claims 7 View
2004-02-25 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-02-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-02-02 CLM Claims 7 View
2004-02-02 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-02-02 XT/ Extension of Time 1 View
2004-02-02 C.AD Change of Address 1 View
2004-02-02 LET. Miscellaneous Incoming Letter 1 View
2003-09-29 CTNF Non-Final Rejection 6 View
2003-09-29 892 List of references cited by examiner 1 View
2003-07-28 RCEX Request for Continued Examination (RCE) 3 View
2003-07-28 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2003-07-28 CLM Claims 7 View
2003-07-28 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-07-28 XT/ Extension of Time 1 View
2003-06-09 CTAV Advisory Action (PTOL-303) 3 View
2003-05-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-05-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-03-25 CTFR Final Rejection 7 View
2003-01-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-01-29 CLM Claims 1 View
2003-01-29 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2002-10-23 CTNF Non-Final Rejection 9 View
2002-10-23 892 List of references cited by examiner 1 View
2002-10-03 RCEX Request for Continued Examination (RCE) 3 View
2002-10-03 CLM Claims 1 View
2002-10-03 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2002-06-26 CTFR Final Rejection 10 View
2002-04-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-04-23 CLM Claims 3 View
2002-04-23 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2002-02-27 LET. Miscellaneous Incoming Letter 1 View
2002-02-27 DRW Drawings-only black and white line drawings 5 View
2002-02-11 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2002-01-14 CTNF Non-Final Rejection 8 View
2002-01-14 892 List of references cited by examiner 1 View
2002-01-07 SRNT Examiner's search strategy and results 2 View
2001-01-09 TRNA Transmittal of New Application 1 View
2001-01-09 SPEC Specification 17 View
2001-01-09 CLM Claims 7 View
2001-01-09 ABST Abstract 1 View
2001-01-09 DRW Drawings-only black and white line drawings 5 View
2001-01-09 OATH Oath or Declaration filed 3 View
2001-01-09 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-01-09 SRFW Search information including classification, databases and other search related notes 1 View
2001-01-09 FWCLM Index of Claims 1 View
2001-01-09 TRNA Transmittal of New Application 1 View
2001-01-09 DRW Drawings-only black and white line drawings 5 View
2001-01-09 SPEC Specification 17 View
2001-01-09 CLM Claims 7 View
2001-01-09 ABST Abstract 1 View
2001-01-09 OATH Oath or Declaration filed 3 View
2001-01-09 WFEE Fee Worksheet (SB06) 1 View
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2001-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
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Quick Facts
App. No.
09/757,123
Filed
2001-01-09
Granted
2004-11-23
Pub. No.
US20020094690A1
Art Unit
1765
PTA
-118 days