Assignment of Assignor's Interest

Recorded: 2001-01-18 Received: 2001-02-06 Pages: 3

Assignors

FUKUDA, HIDEAKI

Executed: 2001-01-09

SATO, KAZUO

Executed: 2001-01-09

SATO, KIYOSHI

Executed: 2001-01-09

Assignee

ASM JAPAN K.K.

23-1, 6-CHOME, NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JPX, JAPAN

Covered Property (1)

Semiconductor-Processing Device Provided with a Remote Plasma Source for Self-Cleaning

Application: 09/764,523 →