IP Library › Granted Patent US 6,736,147
Granted Patent Utility
US 6,736,147 · Confirmation No. 6412

SEMICONDUCTOR-PROCESSING DEVICE PROVIDED WITH A REMOTE PLASMA SOURCE FOR SELF-CLEANING

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2004-02-13 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-13 FWCLM Index of Claims 1 View
2004-02-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-01-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-01-20 CLM Claims 2 View
2004-01-20 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2004-01-08 CTAV Advisory Action (PTOL-303) 3 View
2003-12-18 A.NE Response After Final Action 3 View
2003-12-18 CLM Claims 2 View
2003-12-18 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2003-10-22 CTFR Final Rejection 8 View
2003-09-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-08 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2003-08-13 CTNF Non-Final Rejection 6 View
2003-08-06 SRNT Examiner's search strategy and results 1 View
2003-06-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2003-05-29 CTRS Requirement for Restriction/Election 4 View
2003-03-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2003-03-14 CLM Claims 2 View
2003-03-14 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-02-11 CTRS Requirement for Restriction/Election 4 View
2003-02-10 SRNT Examiner's search strategy and results 1 View
2001-06-25 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2001-06-25 1449 List of References cited by applicant and considered by examiner 1 View
2001-06-25 FOR Foreign Reference 12 View
2001-06-25 FOR Foreign Reference 58 View
2001-06-25 FOR Foreign Reference 54 View
2001-06-25 FOR Foreign Reference 12 View
2001-02-20 A.PE Preliminary Amendment 2 View
2001-02-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-02-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2001-02-12 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-01-18 TRNA Transmittal of New Application 3 View
2001-01-18 SPEC Specification 31 View
2001-01-18 CLM Claims 5 View
2001-01-18 ABST Abstract 1 View
2001-01-18 DRW Drawings-only black and white line drawings 5 View
2001-01-18 OATH Oath or Declaration filed 4 View
2001-01-18 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-01-18 SRFW Search information including classification, databases and other search related notes 1 View
2001-01-18 FWCLM Index of Claims 1 View
2001-01-18 TRNA Transmittal of New Application 3 View
2001-01-18 DRW Drawings-only black and white line drawings 5 View
2001-01-18 SPEC Specification 31 View
2001-01-18 CLM Claims 5 View
2001-01-18 OATH Oath or Declaration filed 4 View
2001-01-18 WFEE Fee Worksheet (SB06) 1 View
2001-01-18 WFEE Fee Worksheet (SB06) 1 View
2001-01-18 WCLM Claims Worksheet (PTO-2022) 1 View
2001-01-18 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2001-01-18 1449 List of References cited by applicant and considered by examiner 1 View
2001-01-18 ABST Abstract 1 View
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Quick Facts
Patent No.
US 6,736,147
App. No.
09/764,523
Filed
2001-01-18
Granted
2004-05-18
Pub. No.
US20020011210A1
Art Unit
1746
PTA
0 days