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App. No. 11/758,601 · Confirmation No. 4775

SEMICONDUCTOR PROCESSING WITH A REMOTE PLASMA SOURCE FOR SELF-CLEANING

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-12-03 ABN Abandonment 2 View
2009-05-20 CTFR Final Rejection 15 View
2009-05-20 892 List of references cited by examiner 1 View
2009-05-20 SRNT Examiner's search strategy and results 1 View
2009-05-20 FWCLM Index of Claims 1 View
2009-05-20 SRFW Search information including classification, databases and other search related notes 1 View
2009-04-21 SA.. Supplemental Response or Supplemental Amendment 1 View
2009-04-21 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2009-04-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-04-21 WFEE Fee Worksheet (SB06) 1 View
2009-03-20 DISQ Terminal Disclaimer review decision 1 View
2009-03-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2009-03-09 CLM Claims 4 View
2009-03-09 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2009-03-09 DIST Terminal Disclaimer Filed 2 View
2009-03-09 WFEE Fee Worksheet (SB06) 2 View
2009-03-09 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-03-09 WFEE Fee Worksheet (SB06) 1 View
2008-12-11 CTNF Non-Final Rejection 15 View
2008-12-11 892 List of references cited by examiner 1 View
2008-12-11 FWCLM Index of Claims 1 View
2008-12-11 SRFW Search information including classification, databases and other search related notes 1 View
2008-12-11 SRNT Examiner's search strategy and results 2 View
2008-09-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-09-02 CLM Claims 3 View
2008-09-02 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2008-09-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-09-02 WFEE Fee Worksheet (SB06) 1 View
2008-06-02 CTNF Non-Final Rejection 11 View
2008-06-02 892 List of references cited by examiner 1 View
2008-06-02 SRNT Examiner's search strategy and results 2 View
2008-06-02 SRFW Search information including classification, databases and other search related notes 1 View
2008-06-02 FWCLM Index of Claims 1 View
2008-06-02 1449 List of References cited by applicant and considered by examiner 1 View
2008-06-02 1449 List of References cited by applicant and considered by examiner 1 View
2008-01-30 TRAN.LET Transmittal Letter 2 View
2008-01-30 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-30 FOR Foreign Reference 9 View
2008-01-30 WFEE Fee Worksheet (SB06) 2 View
2008-01-30 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-01-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2008-01-29 CLM Claims 3 View
2008-01-29 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2008-01-29 TRAN.LET Transmittal Letter 1 View
2008-01-29 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-29 FOR Foreign Reference 8 View
2008-01-29 FOR Foreign Reference 9 View
2008-01-29 WFEE Fee Worksheet (SB06) 2 View
2008-01-29 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-01-29 WFEE Fee Worksheet (SB06) 1 View
2007-10-30 CTNF Non-Final Rejection 10 View
2007-10-30 1449 List of References cited by applicant and considered by examiner 3 View
2007-10-30 892 List of references cited by examiner 1 View
2007-10-30 BIB Bibliographic Data Sheet 1 View
2007-10-30 FWCLM Index of Claims 1 View
2007-10-30 SRFW Search information including classification, databases and other search related notes 1 View
2007-10-18 SRNT Examiner's search strategy and results 4 View
2007-10-04 NTC.PUB Notice of Publication 1 View
2007-09-05 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2007-09-05 FOR Foreign Reference 9 View
2007-09-05 FOR Foreign Reference 9 View
2007-09-05 FOR Foreign Reference 27 View
2007-09-05 FOR Foreign Reference 49 View
2007-09-05 FOR Foreign Reference 25 View
2007-09-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-06-25 APP.FILE.REC Filing Receipt 3 View
2007-06-05 ADS Application Data Sheet 5 View
2007-06-05 SPEC Specification 31 View
2007-06-05 CLM Claims 3 View
2007-06-05 ABST Abstract 1 View
2007-06-05 DRW Drawings-only black and white line drawings 5 View
2007-06-05 LET. Miscellaneous Incoming Letter 17 View
2007-06-05 OATH Oath or Declaration filed 2 View
2007-06-05 WFEE Fee Worksheet (SB06) 2 View
2007-06-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2007-06-05 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/758,601
Filed
2007-06-05
Pub. No.
US20070227554A1
Art Unit
1792