IP Library › Patent Application 10759925
Patent Application Utility
App. No. 10/759,925 · Confirmation No. 8224

Semiconductor processing with a remote plasma source for self-cleaning

Abandoned -- Failure to Respond to an Office Action View Publication ↗
⬇ PDF
 Code Description Pages PDF
2007-09-11 ABN Abandonment 2 View
2007-06-05 XT/ Extension of Time 1 View
2007-06-05 WFEE Fee Worksheet (SB06) 2 View
2007-06-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-02-13 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2007-02-05 CTFR Final Rejection 13 View
2007-02-05 1449 List of References cited by applicant and considered by examiner 1 View
2007-02-05 892 List of references cited by examiner 1 View
2007-02-05 FWCLM Index of Claims 1 View
2007-02-05 BIB Bibliographic Data Sheet 1 View
2006-11-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-11-10 CLM Claims 3 View
2006-11-10 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2006-11-10 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-11-10 WFEE Fee Worksheet (SB06) 2 View
2006-11-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2006-11-10 WFEE Fee Worksheet (SB06) 1 View
2006-07-10 CTNF Non-Final Rejection 6 View
2006-07-10 1449 List of References cited by applicant and considered by examiner 1 View
2006-07-10 892 List of references cited by examiner 1 View
2006-07-10 FWCLM Index of Claims 1 View
2006-07-10 SRFW Search information including classification, databases and other search related notes 1 View
2006-07-10 BIB Bibliographic Data Sheet 1 View
2006-06-29 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-05-02 WFEE Fee Worksheet (SB06) 1 View
2006-04-24 RCEX Request for Continued Examination (RCE) 2 View
2006-04-14 CTAV Advisory Action (PTOL-303) 4 View
2006-03-23 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2006-03-23 CLM Claims 1 View
2006-03-23 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-03-23 LET. Miscellaneous Incoming Letter 2 View
2006-03-23 WFEE Fee Worksheet (SB06) 1 View
2006-03-23 FWCLM Index of Claims 1 View
2006-02-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-01-18 CTFR Final Rejection 8 View
2006-01-18 1449 List of References cited by applicant and considered by examiner 2 View
2006-01-18 892 List of references cited by examiner 1 View
2006-01-18 FWCLM Index of Claims 1 View
2006-01-18 BIB Bibliographic Data Sheet 1 View
2006-01-12 SRNT Examiner's search strategy and results 1 View
2005-12-27 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2005-11-08 WFEE Fee Worksheet (SB06) 1 View
2005-11-08 FWCLM Index of Claims 1 View
2005-11-03 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-11-03 SPEC Specification 1 View
2005-11-03 CLM Claims 4 View
2005-11-03 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2005-11-03 XT/ Extension of Time 2 View
2005-11-03 DRW Drawings-only black and white line drawings 1 View
2005-09-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-06-30 CTNF Non-Final Rejection 10 View
2005-06-30 892 List of references cited by examiner 1 View
2005-06-30 FWCLM Index of Claims 1 View
2005-06-30 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-30 BIB Bibliographic Data Sheet 1 View
2005-06-13 RCEX Request for Continued Examination (RCE) 2 View
2005-06-13 WFEE Fee Worksheet (SB06) 1 View
2005-06-13 FWCLM Index of Claims 1 View
2005-05-26 CTAV Advisory Action (PTOL-303) 3 View
2005-05-26 FWCLM Index of Claims 1 View
2005-05-26 BIB Bibliographic Data Sheet 1 View
2005-05-26 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2005-05-23 WFEE Fee Worksheet (SB06) 1 View
2005-05-23 FWCLM Index of Claims 1 View
2005-05-17 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 2 View
2005-05-17 CLM Claims 3 View
2005-05-17 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2005-03-15 CTFR Final Rejection 11 View
2005-03-15 1449 List of References cited by applicant and considered by examiner 1 View
2005-03-15 DISQ Terminal Disclaimer review decision 1 View
2005-03-15 FWCLM Index of Claims 1 View
2005-03-15 BIB Bibliographic Data Sheet 1 View
2004-12-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-12-23 SPEC Specification 4 View
2004-12-23 CLM Claims 3 View
2004-12-23 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2004-12-23 DIST Terminal Disclaimer Filed 6 View
2004-12-23 DRW Drawings-only black and white line drawings 1 View
2004-12-23 XT/ Extension of Time 2 View
2004-12-23 136A Authorization for Extension of Time all replies 2 View
2004-12-23 WFEE Fee Worksheet (SB06) 1 View
2004-12-23 FWCLM Index of Claims 1 View
2004-12-23 DISQ Terminal Disclaimer review decision 1 View
2004-10-13 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-09-08 CTNF Non-Final Rejection 11 View
2004-09-08 1449 List of References cited by applicant and considered by examiner 1 View
2004-09-08 892 List of references cited by examiner 1 View
2004-09-08 FWCLM Index of Claims 1 View
2004-09-08 SRFW Search information including classification, databases and other search related notes 1 View
2004-09-08 BIB Bibliographic Data Sheet 1 View
2004-09-01 SRNT Examiner's search strategy and results 1 View
2004-03-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-03-15 FOR Foreign Reference 8 View
2004-01-16 TRNA Transmittal of New Application 3 View
2004-01-16 SPEC Specification 31 View
2004-01-16 CLM Claims 3 View
2004-01-16 ABST Abstract 1 View
2004-01-16 DRW Drawings-only black and white line drawings 5 View
2004-01-16 OATH Oath or Declaration filed 2 View
2004-01-16 WFEE Fee Worksheet (SB06) 1 View
2004-01-16 WFEE Fee Worksheet (SB06) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
10/759,925
Filed
2004-01-16
Pub. No.
US20040144400A1
Art Unit
1762