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App. No. 10/759,953 · Confirmation No. 8185

Semiconductor processing device provided with a remote plasma source for self-cleaning

Abandoned -- After Examiner's Answer or Board of Appeals Decision View Publication ↗
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2010-10-01 ABN Abandonment 2 View
2010-06-21 APDA Patent Board Decision - Examiner Affirmed 10 View
2010-04-16 RFN.REQ Refund Request 1 View
2010-04-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-08-17 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-08-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-08-17 TRAN.LET Transmittal Letter 1 View
2009-08-17 WFEE Fee Worksheet (SB06) 1 View
2009-08-17 WFEE Fee Worksheet (SB06) 1 View
2009-07-16 AP_DK_M Appeal Docketing Notice 2 View
2009-07-06 RBNE Reply Brief Noted - Patent Board 2 View
2009-07-06 RBNE Reply Brief Noted - Patent Board 2 View
2009-04-23 APRB Reply Brief Filed 7 View
2009-04-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-04-07 M327 Miscellaneous Communication to Applicant - No Action Count 4 View
2009-04-07 1449 List of References cited by applicant and considered by examiner 1 View
2009-04-07 1449 List of References cited by applicant and considered by examiner 1 View
2009-04-07 1449 List of References cited by applicant and considered by examiner 4 View
2009-02-24 APEA Examiner's Answer to Appeal Brief 21 View
2009-02-20 TRAN.LET Transmittal Letter 2 View
2009-02-20 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2009-02-20 WFEE Fee Worksheet (SB06) 2 View
2009-02-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2009-02-20 WFEE Fee Worksheet (SB06) 1 View
2009-02-20 WFEE Fee Worksheet (SB06) 1 View
2008-11-19 AP.B Appeal Brief Filed 113 View
2008-11-19 AP.B Appeal Brief Filed 1 View
2008-11-19 AP.B Appeal Brief Filed 30 View
2008-11-19 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-11-17 APBD Notice - Defective Appeal Brief 2 View
2008-08-22 AP.B Appeal Brief Filed 29 View
2008-08-22 AP.B Appeal Brief Filed 113 View
2008-08-22 AP.B Appeal Brief Filed 1 View
2008-08-22 WFEE Fee Worksheet (SB06) 2 View
2008-08-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-06-23 N/AP Notice of Appeal Filed 2 View
2008-06-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-06-05 TRAN.LET Transmittal Letter 1 View
2008-06-05 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-06-05 WFEE Fee Worksheet (SB06) 2 View
2008-06-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2008-04-01 CTNF Non-Final Rejection 16 View
2008-04-01 1449 List of References cited by applicant and considered by examiner 3 View
2008-04-01 1449 List of References cited by applicant and considered by examiner 1 View
2008-01-29 TRAN.LET Transmittal Letter 2 View
2008-01-29 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-29 WFEE Fee Worksheet (SB06) 2 View
2008-01-29 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-12-28 AP.B Appeal Brief Filed 142 View
2007-12-28 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-12-28 LET. Miscellaneous Incoming Letter 2 View
2007-11-01 N/AP Notice of Appeal Filed 2 View
2007-11-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-08-02 CTNF Non-Final Rejection 19 View
2007-08-02 892 List of references cited by examiner 1 View
2007-08-02 SRFW Search information including classification, databases and other search related notes 1 View
2007-07-23 SRNT Examiner's search strategy and results 4 View
2007-04-16 AP.B Appeal Brief Filed 87 View
2007-03-19 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2007-02-20 CTAV Advisory Action (PTOL-303) 3 View
2007-02-20 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2007-02-20 N/AP Notice of Appeal Filed 2 View
2007-02-20 INTRVIEW.APP Applicant summary of interview with examiner 2 View
2007-02-13 OA.POSTCARD A courtesy postcard sent by USPTO to users who opt-in for e-Office Action 1 View
2007-02-02 CTAV Advisory Action (PTOL-303) 2 View
2007-01-30 WFEE Fee Worksheet (SB06) 1 View
2007-01-16 A.NE Response After Final Action 1 View
2007-01-16 CLM Claims 3 View
2007-01-16 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2007-01-16 LET. Miscellaneous Incoming Letter 1 View
2007-01-16 AF/D Affidavit-submitted prior to Mar 15, 2013 3 View
2006-11-16 CTFR Final Rejection 12 View
2006-11-16 1449 List of References cited by applicant and considered by examiner 1 View
2006-08-22 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2006-08-22 CLM Claims 4 View
2006-08-22 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2006-08-22 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-08-22 LET. Miscellaneous Incoming Letter 2 View
2006-08-22 WFEE Fee Worksheet (SB06) 1 View
2006-05-18 CTNF Non-Final Rejection 11 View
2006-05-18 892 List of references cited by examiner 1 View
2006-05-18 FOR Foreign Reference 49 View
2006-05-18 1449 List of References cited by applicant and considered by examiner 1 View
2006-05-18 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-15 SRNT Examiner's search strategy and results 1 View
2006-04-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2006-02-27 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2006-02-27 CLM Claims 4 View
2006-02-27 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2006-02-27 RCEX Request for Continued Examination (RCE) 2 View
2006-02-27 WFEE Fee Worksheet (SB06) 1 View
2006-02-27 FWCLM Index of Claims 1 View
2005-12-09 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2005-11-23 CTFR Final Rejection 11 View
2005-11-23 1449 List of References cited by applicant and considered by examiner 1 View
2005-11-23 892 List of references cited by examiner 1 View
2005-11-23 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-09-15 CLM Claims 6 View
2005-09-15 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2005-09-15 LET. Miscellaneous Incoming Letter 2 View
2005-09-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-09-15 WFEE Fee Worksheet (SB06) 1 View
2005-06-14 CTNF Non-Final Rejection 9 View
2005-06-14 1449 List of References cited by applicant and considered by examiner 1 View
2005-06-14 892 List of references cited by examiner 1 View
2005-06-14 SRFW Search information including classification, databases and other search related notes 1 View
2005-06-01 RCEX Request for Continued Examination (RCE) 2 View
2005-06-01 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2005-06-01 CLM Claims 6 View
2005-06-01 REM Applicant Arguments/Remarks Made in an Amendment 10 View
2005-06-01 WFEE Fee Worksheet (SB06) 1 View
2005-04-08 CTAV Advisory Action (PTOL-303) 3 View
2005-04-06 SA.. Supplemental Response or Supplemental Amendment 3 View
2005-04-06 CLM Claims 6 View
2005-04-06 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-04-06 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2005-04-06 WFEE Fee Worksheet (SB06) 1 View
2005-04-06 WFEE Fee Worksheet (SB06) 1 View
2005-03-29 A.NE Response After Final Action 2 View
2005-03-29 CLM Claims 6 View
2005-03-29 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2005-03-29 WFEE Fee Worksheet (SB06) 1 View
2004-12-29 CTFR Final Rejection 17 View
2004-12-29 892 List of references cited by examiner 1 View
2004-12-29 FWCLM Index of Claims 1 View
2004-12-29 SRFW Search information including classification, databases and other search related notes 1 View
2004-12-21 SRNT Examiner's search strategy and results 2 View
2004-11-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-11-08 SPEC Specification 1 View
2004-11-08 CLM Claims 5 View
2004-11-08 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2004-11-08 LET. Miscellaneous Incoming Letter 2 View
2004-11-08 136A Authorization for Extension of Time all replies 2 View
2004-11-08 WFEE Fee Worksheet (SB06) 1 View
2004-10-13 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2004-08-11 CTNF Non-Final Rejection 12 View
2004-08-11 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-11 892 List of references cited by examiner 1 View
2004-08-11 FWCLM Index of Claims 1 View
2004-08-11 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-11 BIB Bibliographic Data Sheet 1 View
2004-08-04 SRNT Examiner's search strategy and results 7 View
2004-03-15 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-03-15 FOR Foreign Reference 8 View
2004-01-16 TRNA Transmittal of New Application 3 View
2004-01-16 SPEC Specification 31 View
2004-01-16 CLM Claims 5 View
2004-01-16 ABST Abstract 1 View
2004-01-16 DRW Drawings-only black and white line drawings 5 View
2004-01-16 OATH Oath or Declaration filed 2 View
2004-01-16 WFEE Fee Worksheet (SB06) 1 View
2004-01-16 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/759,953
Filed
2004-01-16
Pub. No.
US20040144489A1
Art Unit
1716