Patent Assignment
Reel/Frame 011886/0470
Re-Record to Correct an Assignor on Reel 011484 Frame 0045. Assignor Hereby Confirms the Assignment of the Entire Interest.
Recorded: 2001-06-11
Received: 2001-06-15
Pages: 4
Assignors
FUKUDA, HIDEAKI
Executed: 2001-01-09
SATO, KAZUO
Executed: 2001-01-09
SATOH, KIYOSHI
Executed: 2001-01-09
Assignee
ASM JAPAN K.K.
23-1, 6-CHOME NAGAYAMA, TAMA-SHI, TOKYO 206-0025, JPX, JAPAN
Covered Property
(1)
Semiconductor-Processing Device Provided with a Remote Plasma Source for Self-Cleaning
Application:
09/764,523 →