Patent Assignment
Reel/Frame 011491/0224
Assignment of Assignor's Interest
Recorded: 2001-01-29
Received: 2001-02-08
Pages: 2
Assignor
NARITA, TADASHI
Executed: 2000-10-12
Assignee
OKI ELECTRIC INDUSTRY CO., LTD.
7-12, TORANOMON 1-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Evaluating Pattern for Measuring an Erosion of a Semiconductor Wafer Polished by a Chemical Mechanical Polishing
Application:
09/770,501 →