Patent Assignment
Reel/Frame 011540/0080
Assignment of Assignor's Interest
Recorded: 2001-02-07
Received: 2001-03-05
Pages: 2
Assignors
DE VRIEZE-VORN, SONJA T.
Executed: 2001-01-18
KWAN, KIM B.P.
Executed: 2001-01-18
LOOPSTRA, ERIC R.
Executed: 2001-01-18
MUITJENS, MARCEL J.E.H.
Executed: 2001-01-18
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Properties
(2)
Lithographic Projection Apparatus Having a Temperature Controlled Heat Shield
Application:
09/777,697 →
Dual Tone Multi Frequency Signal Detection
Application:
09/776,620 →