IP Library Granted Patent US 6,509,951
Granted Patent Utility
US 6,509,951 · Confirmation No. 4357

LITHOGRAPHIC PROJECTION APPARATUS HAVING A TEMPERATURE CONTROLLED HEAT SHIELD

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Code Description Pages PDF
2001-02-07 TRNA Transmittal of New Application 2 View
2001-02-07 A.PE Preliminary Amendment 7 View
2001-02-07 SPEC Specification 15 View
2001-02-07 CLM Claims 3 View
2001-02-07 ABST Abstract 1 View
2001-02-07 DRW Drawings-only black and white line drawings 4 View
2001-02-07 OATH Oath or Declaration filed 2 View
2001-02-07 TRNA Transmittal of New Application 2 View
2001-02-07 A.PE Preliminary Amendment 7 View
2001-02-07 SPEC Specification 15 View
2001-02-07 CLM Claims 3 View
2001-02-07 ABST Abstract 1 View
2001-02-07 DRW Drawings-only black and white line drawings 4 View
2001-02-07 OATH Oath or Declaration filed 2 View
2001-02-07 TRNA Transmittal of New Application 2 View
2001-02-07 A.PE Preliminary Amendment 7 View
2001-02-07 SPEC Specification 15 View
2001-02-07 CLM Claims 3 View
2001-02-07 ABST Abstract 1 View
2001-02-07 DRW Drawings-only black and white line drawings 4 View
2001-02-07 OATH Oath or Declaration filed 2 View
2001-02-07 TRNA Transmittal of New Application 2 View
2001-02-07 A.PE Preliminary Amendment 7 View
2001-02-07 SPEC Specification 15 View
2001-02-07 CLM Claims 3 View
2001-02-07 ABST Abstract 1 View
2001-02-07 DRW Drawings-only black and white line drawings 4 View
2001-02-07 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,509,951
App. No.
09/777,697
Filed
2001-02-07
Granted
2003-01-21
Pub. No.
US20010013925A1
Art Unit
2851
PTA
0 days