Granted Patent
Utility
US 6,509,951
· Confirmation No. 4357
LITHOGRAPHIC PROJECTION APPARATUS HAVING A TEMPERATURE CONTROLLED HEAT SHIELD
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-07 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-02-07 | SPEC |
Specification | 15 | View | |
| 2001-02-07 | CLM |
Claims | 3 | View | |
| 2001-02-07 | ABST |
Abstract | 1 | View | |
| 2001-02-07 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-07 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-02-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-07 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-02-07 | SPEC |
Specification | 15 | View | |
| 2001-02-07 | CLM |
Claims | 3 | View | |
| 2001-02-07 | ABST |
Abstract | 1 | View | |
| 2001-02-07 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-07 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-02-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-07 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-02-07 | SPEC |
Specification | 15 | View | |
| 2001-02-07 | CLM |
Claims | 3 | View | |
| 2001-02-07 | ABST |
Abstract | 1 | View | |
| 2001-02-07 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-07 | OATH |
Oath or Declaration filed | 2 | View | |
| 2001-02-07 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-02-07 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-02-07 | SPEC |
Specification | 15 | View | |
| 2001-02-07 | CLM |
Claims | 3 | View | |
| 2001-02-07 | ABST |
Abstract | 1 | View | |
| 2001-02-07 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2001-02-07 | OATH |
Oath or Declaration filed | 2 | View |
Inventors
Erik R. Loopstra
Heeze, NETHERLANDS
Yim Bun Kwan
Eindhoven, NETHERLANDS
Marcel J.E.H. Muitjens
Nuth, NETHERLANDS
Sonja T. De Vrieze - Voom
Bakel, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/30
H10P76/00
G03F7/70716
H02K9/227
G03F7/70725
G03F7/70758
G03F7/70775
G03F7/70858
G03F7/70875
G03F7/70891
H02K3/24
H02K41/0356
Prosecution
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 276720
- Confirmation No.
- 4357
Foreign Priority
00200432.3
·
2000-02-10
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20010013925A1
- Pub. Date
- 2001-08-16
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-02-07
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Quick Facts
- Patent No.
- US 6,509,951
- App. No.
- 09/777,697
- Filed
- 2001-02-07
- Granted
- 2003-01-21
- Pub. No.
- US20010013925A1
- Examiner
- MATHEWS, ALAN A
- Art Unit
- 2851
- PTA
- 0 days
External Links