Patent Assignment
Reel/Frame 012735/0001
Change of Name
Recorded: 2002-03-28
Received: 2002-04-04
Pages: 18
Assignor
ASM LITHOGRAPHY B.V.
Executed: 2002-01-25
Assignee
ASML NETHERLANDS B.V.
DE RUN 1110, 5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Properties
(37)
Lithographic Apparatus, Device Manufacturing Mehtod, and Device Manufactured Thereby
Application:
09/989,700 →
Lithographic Apparatus, Integrated Circuit Device Manufacturing Method, and Integrated Circuit Device Manufactured Thereby
Application:
09/988,387 →
Lithographic Projection Apparatus, Device Manufacturing Method, Device Manufactured Thereby, Cleaning Unit and Method of Cleaning Contaminated Objects
Application:
09/988,830 →
Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Application:
09/988,391 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/985,645 →
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
Application:
09/972,204 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/971,769 →
Method for Calibrating a Lithographic Projection Apparatus and Apparatus Capable of Applying Such a Method
Application:
09/944,145 →
Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Application:
09/943,758 →
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
Application:
09/942,953 →
Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Application:
09/942,952 →
Method of Operating a Lithographic Apparatus, Lithographic Apparatus, Method of Manufacturing a Device, and Device Manufactured Thereby
Application:
09/943,088 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/934,681 →
Mask Handling Apparatus, Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Application:
09/934,698 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/928,462 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/925,723 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/919,616 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/902,490 →
Lithographic Projection Apparatus, Device Manufacturing Method, Device Manufactured Thereby and Gas Composition
Application:
09/899,566 →
Lithographic Projection Apparatus and Device Manufacturing Method
Application:
09/899,560 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/897,720 →
Radiation Source, Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/893,347 →
Method of Operating an Optical Imaging System, Lithographic Projection Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/878,182 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/866,875 →
Lithographic Projection Apparatus, Supporting Assembly and Device Manufacturing Method
Application:
09/866,913 →
Lithographic Projection Apparatus, a Method for Determining a Position of a Substrate Alignment Mark, a Device Manufacturing Method and Device Manufactured Thereby
Application:
09/842,203 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/833,077 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/827,350 →
Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
09/813,135 →
Substrate Holder for Lithographic Apparatus
Application:
09/805,179 →
Method of Measuring Aberration in an Optical Imaging System
Application:
09/788,478 →
Object Positioning Method for a Lithographic Projection Apparatus
Application:
09/777,460 →
Cooling of Voice Coil Motors in Lithographic Projection Apparatus
Application:
09/777,701 →
Lithographic Projection Apparatus Having a Temperature Controlled Heat Shield
Application:
09/777,697 →
Microlithography Projection Apparatus
Application:
09/761,837 →
Abbe Arm Calibration System for Use in Lithographic Apparatus
Application:
09/758,172 →
A Lithographic Projection Apparatus Equipped with Extreme Ultraviolet Window Serving Simultaneously as Vacuum Window
Application:
09/752,818 →