IP Library › Granted Patent US 6,730,920
Granted Patent Utility
US 6,730,920 · Confirmation No. 9375

ABBE ARM CALIBRATION SYSTEM FOR USE IN LITHOGRAPHIC APPARATUS

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2004-05-05 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-05-05 FOR Foreign Reference 43 View
2004-02-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-23 LET. Miscellaneous Incoming Letter 2 View
2003-11-28 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-28 NOA Notice of Allowance and Fees Due (PTOL-85) 5 View
2003-11-28 892 List of references cited by examiner 1 View
2003-11-28 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-28 FWCLM Index of Claims 1 View
2003-11-28 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-24 FRPR Certified Copy of Foreign Priority Application 34 View
2003-09-03 A.NE Response After Final Action 2 View
2003-09-03 CLM Claims 4 View
2003-09-03 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2003-06-03 CTFR Final Rejection 15 View
2003-03-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-03-05 SPEC Specification 3 View
2003-03-05 CLM Claims 1 View
2003-03-05 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2002-11-21 CTNF Non-Final Rejection 13 View
2002-11-21 892 List of references cited by examiner 1 View
2002-11-21 FOR Foreign Reference 8 View
2002-11-21 FOR Foreign Reference 12 View
2002-11-14 SRNT Examiner's search strategy and results 14 View
2002-11-06 SRNT Examiner's search strategy and results 4 View
2002-04-23 C.AD Change of Address 1 View
2001-01-12 TRNA Transmittal of New Application 2 View
2001-01-12 A.PE Preliminary Amendment 7 View
2001-01-12 SPEC Specification 15 View
2001-01-12 CLM Claims 4 View
2001-01-12 ABST Abstract 1 View
2001-01-12 DRW Drawings-only black and white line drawings 4 View
2001-01-12 OATH Oath or Declaration filed 2 View
2001-01-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-01-12 SRFW Search information including classification, databases and other search related notes 1 View
2001-01-12 FWCLM Index of Claims 1 View
2001-01-12 TRNA Transmittal of New Application 3 View
2001-01-12 DRW Drawings-only black and white line drawings 4 View
2001-01-12 SPEC Specification 14 View
2001-01-12 CLM Claims 4 View
2001-01-12 ABST Abstract 1 View
2001-01-12 OATH Oath or Declaration filed 2 View
2001-01-12 WFEE Fee Worksheet (SB06) 1 View
2001-01-12 WFEE Fee Worksheet (SB06) 1 View
2001-01-12 WCLM Claims Worksheet (PTO-2022) 1 View
2001-01-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2001-01-12 CLM Claims 5 View
2001-01-12 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2001-01-12 FRPR Certified Copy of Foreign Priority Application 30 View
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Quick Facts
Patent No.
US 6,730,920
App. No.
09/758,172
Filed
2001-01-12
Granted
2004-05-04
Pub. No.
US20010008273A1
Art Unit
2881
PTA
-83 days