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App. No. 10/815,651 · Confirmation No. 8198

Abbe arm calibration system for use in lithographic apparatus

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2006-04-17 ABN Abandonment 2 View
2006-04-17 BIB Bibliographic Data Sheet 1 View
2005-10-04 CTNF Non-Final Rejection 9 View
2005-10-04 1449 List of References cited by applicant and considered by examiner 1 View
2005-10-04 892 List of references cited by examiner 1 View
2005-10-04 BIB Bibliographic Data Sheet 1 View
2005-10-04 FWCLM Index of Claims 1 View
2005-10-04 SRFW Search information including classification, databases and other search related notes 1 View
2005-09-27 SRNT Examiner's search strategy and results 3 View
2004-06-30 WFEE Fee Worksheet (SB06) 1 View
2004-06-30 WCLM Claims Worksheet (PTO-2022) 1 View
2004-05-05 A.PE Preliminary Amendment 2 View
2004-05-05 CLM Claims 5 View
2004-05-05 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-04-02 TRNA Transmittal of New Application 3 View
2004-04-02 SPEC Specification 18 View
2004-04-02 CLM Claims 1 View
2004-04-02 ABST Abstract 1 View
2004-04-02 DRW Drawings-only black and white line drawings 4 View
2004-04-02 OATH Oath or Declaration filed 2 View
2004-04-02 ADS Application Data Sheet 3 View
2004-04-02 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-04-02 FRPR Certified Copy of Foreign Priority Application 9 View
2004-04-02 WFEE Fee Worksheet (SB06) 1 View
2004-04-02 WFEE Fee Worksheet (SB06) 1 View
2004-04-02 FOR Foreign Reference 44 View
2004-04-02 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/815,651
Filed
2004-04-02
Pub. No.
US20040184018A1
Art Unit
2881