Patent Assignment
Reel/Frame 015179/0209
Assignment of Assignor's Interest
Recorded: 2004-04-02
Pages: 2
Assignors
GROENEVELD, ROGIER HERMAN MATHIJS
Executed: 2001-01-03
LOOPSTRA, ERIK ROELOF
Executed: 2001-01-03
BURGHOORN, JACOBUS
Executed: 2001-01-03
LEVASIER, LEON MARTIN
Executed: 2001-01-03
STRAAIJER, ALEXANDER
Executed: 2001-01-03
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NETHERLANDS
Covered Property
(1)
Abbe arm calibration system for use in lithographic apparatus
Application:
10/815,651 →
Publication:
US 2004/0184018