Patent Application
Utility
App. No. 09/972,204
· Confirmation No. 3102
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
Abandoned -- Failure to Respond to an Office Action
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2002-02-01 | TRNA |
Transmittal of New Application | 3 | View | |
| 2002-02-01 | A.PE |
Preliminary Amendment | 10 | View | |
| 2002-02-01 | OATH |
Oath or Declaration filed | 4 | View | |
| 2001-10-09 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-10-09 | SPEC |
Specification | 23 | View | |
| 2001-10-09 | CLM |
Claims | 4 | View | |
| 2001-10-09 | ABST |
Abstract | 1 | View | |
| 2001-10-09 | DRW |
Drawings-only black and white line drawings | 8 | View |
Inventors
Johannes Hubertus Josephina Moors
Helmond, NETHERLANDS
Vadim Yevgenyevich Banine
Helmond, NETHERLANDS
Martinus Hendrikus Antonius Leenders
Rotterdam, NETHERLANDS
Henri Gerard Cato Werij
Rotterdam, NETHERLANDS
Hugo Matthieu Visser
Utrecht, NETHERLANDS
Gerrit-Jan Heerens
Schoonhoven, NETHERLANDS
Erik Leonardus Ham
Rotterdam, NETHERLANDS
Hans Meiling
Bilthoven, NETHERLANDS
Erik Roelof Loopstra
Heeze, NETHERLANDS
Sjoerd Nicolaas Lambertus Donders
's-Hertogenbosch, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/69
H10P76/00
G03F7/70558
G03F7/70741
G03F7/7085
G03F7/70908
G03F7/70916
G03F7/70983
Prosecution
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 284400 P-0204.020-US
- Confirmation No.
- 3102
Foreign Priority
01302647.1
·
2001-03-22
·
EUROPEAN PATENT OFFICE (EPO)
01304489.6
·
2001-05-21
·
EUROPEAN PATENT OFFICE (EPO)
00202960.1
·
2000-08-25
·
EUROPEAN PATENT OFFICE (EPO)
00307594.0
·
2000-09-04
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020096647A1
- Pub. Date
- 2002-07-25
No related applications found.
from
BANINE, VADIM YEVGENYEVICH,
DONDERS, SJOERD NICOLAAS LAMBERTUS,
HAM, ERIK LEONARDUS,
HEERENS, GERRIT-JAN,
LEENDERS, MARTINUS HENDRIKUS ANTONIUS,
LOOPSTRA, ERIK ROELOF,
MEILING, HANS,
MOORS, JOHANNES HUBERTUS JOSEPHINA,
VISSER, HUGO MATTHIEU,
WERIJ, HENRI GERARD CATO
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-01
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Quick Facts
- App. No.
- 09/972,204
- Filed
- 2001-10-09
- Pub. No.
- US20020096647A1
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
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