Granted Patent
Utility
US 6,678,037
· Confirmation No. 2492
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-11-20 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-10-09 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-10-09 | SPEC |
Specification | 22 | View | |
| 2001-10-09 | CLM |
Claims | 3 | View | |
| 2001-10-09 | ABST |
Abstract | 1 | View | |
| 2001-10-09 | DRW |
Drawings-only black and white line drawings | 3 | View |
Inventors
Jan Van Elp
Delft, NETHERLANDS
Martinus Hendrikus Antonius Leenders
Rotterdam, NETHERLANDS
Vadim Yevgenyevich Banine
Helmond, NETHERLANDS
Hugo Matthieu Visser
Utrecht, NETHERLANDS
Levinus Pieter Bakker
Eindhoven, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/67
Prosecution
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 283663 P-0210.010-US
- Confirmation No.
- 2492
Foreign Priority
00308903.4
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2000-10-10
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020097385A1
- Pub. Date
- 2002-07-25
Patent Term Adjustment
-1days
from
BAKKER, LEVINUS PIETER,
BANINE, VADIM YEVGENYEVICH,
LEENDERS, MARTINUS HENDRIKUS ANTONIUS,
VAN ELP, JAN,
VISSER, HUGO MATTHIEU
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-01-28
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Quick Facts
- Patent No.
- US 6,678,037
- App. No.
- 09/971,769
- Filed
- 2001-10-09
- Granted
- 2004-01-13
- Pub. No.
- US20020097385A1
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- PTA
- -1 days
External Links