Granted Patent
Utility
US 6,819,425
· Confirmation No. 7375
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Inventor:
Yim Bun Kwan
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-05-05 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2009-01-12 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-01-12 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-12-29 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-12-29 | PA.. |
Power of Attorney | 1 | View | |
| 2008-12-29 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2008-12-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2005-04-28 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2005-02-14 | COCIN |
Request for Certificate of Correction | 4 | View | |
| 2004-09-10 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-09-10 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-09-10 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2004-09-08 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2004-09-08 | SPEC |
Specification | 1 | View | |
| 2004-08-17 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-07-27 | A.NA |
Amendment after Notice of Allowance (Rule 312) | 2 | View | |
| 2004-07-27 | SPEC |
Specification | 1 | View | |
| 2004-07-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-18 | SPEC |
Specification | 1 | View | |
| 2004-06-18 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2004-06-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-18 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-14 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-04-20 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2004-04-20 | SPEC |
Specification | 3 | View | |
| 2004-04-20 | CLM |
Claims | 7 | View | |
| 2004-04-20 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2004-04-20 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2004-04-20 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2004-02-09 | CTNF |
Non-Final Rejection | 12 | View | |
| 2004-02-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-09 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2003-12-03 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-03-18 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2003-03-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2003-03-07 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-03-07 | A.PE |
Preliminary Amendment | 1 | View | |
| 2003-03-07 | CLM |
Claims | 11 | View | |
| 2003-03-07 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2002-11-15 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2001-10-25 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2001-10-25 | OATH |
Oath or Declaration filed | 1 | View | |
| 2001-09-28 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-08-22 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-08-22 | SPEC |
Specification | 22 | View | |
| 2001-08-22 | CLM |
Claims | 6 | View | |
| 2001-08-22 | ABST |
Abstract | 1 | View | |
| 2001-08-22 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-08-22 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-08-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-08-22 | FWCLM |
Index of Claims | 1 | View | |
| 2001-08-22 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-08-22 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-08-22 | SPEC |
Specification | 21 | View | |
| 2001-08-22 | CLM |
Claims | 6 | View | |
| 2001-08-22 | ABST |
Abstract | 1 | View | |
| 2001-08-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2001-08-22 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2001-08-22 | FRPR |
Certified Copy of Foreign Priority Application | 32 | View |
Inventors
Yim Bun Kwan
Munich, GERMANY
Attorneys & Agents of Record
Classification
USPC
356/399
H10P76/00
G03F7/70775
G03F9/7053
Prosecution
- Examiner
- BROWN, KHALED
- Art Unit
- 2877
- Customer No.
- 26111
- Docket No.
- 1857.5280000
- Confirmation No.
- 7375
Foreign Priority
00307306.1
·
2000-08-24
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020041380A1
- Pub. Date
- 2002-04-11
Patent Term Adjustment
-112days
Child
is a Continuation in-part of
→
App. 10/825,215
· US 7,289,212
Filed 2004-04-16
· Patented Case
Child
is a Continuation in-part of
→
App. 12/194,789
· US 7,633,619
Filed 2008-08-20
· Patented Case
Child
is a Continuation in-part of
→
App. 11/293,508
· US 7,561,270
Filed 2005-12-05
· Patented Case
Child
is a Continuation in-part of
→
App. 12/471,988
· US 7,940,392
Filed 2009-05-26
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-25
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Quick Facts
- Patent No.
- US 6,819,425
- App. No.
- 09/928,462
- Filed
- 2001-08-22
- Granted
- 2004-11-16
- Pub. No.
- US20020041380A1
- Examiner
- BROWN, KHALED
- Art Unit
- 2877
- PTA
- -112 days
External Links