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App. No. 09/761,837 · Confirmation No. 5836

MICROLITHOGRAPHY PROJECTION APPARATUS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-01-18 TRNA Transmittal of New Application 2 View
2001-01-18 A.PE Preliminary Amendment 5 View
2001-01-18 SPEC Specification 12 View
2001-01-18 CLM Claims 2 View
2001-01-18 ABST Abstract 1 View
2001-01-18 DRW Drawings-only black and white line drawings 3 View
2001-01-18 OATH Oath or Declaration filed 1 View
2001-01-18 TRNA Transmittal of New Application 2 View
2001-01-18 A.PE Preliminary Amendment 5 View
2001-01-18 SPEC Specification 12 View
2001-01-18 CLM Claims 2 View
2001-01-18 ABST Abstract 1 View
2001-01-18 DRW Drawings-only black and white line drawings 3 View
2001-01-18 OATH Oath or Declaration filed 1 View
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Quick Facts
App. No.
09/761,837
Filed
2001-01-18
Granted
2003-02-18
Pub. No.
US20010012101A1
Art Unit
2851
PTA
0 days