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App. No. 09/866,875 · Confirmation No. 4509

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2001-05-30 TRNA Transmittal of New Application 2 View
2001-05-30 SPEC Specification 22 View
2001-05-30 CLM Claims 4 View
2001-05-30 ABST Abstract 1 View
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Quick Facts
App. No.
09/866,875
Filed
2001-05-30
Granted
2003-03-25
Pub. No.
US20020018189A1
Art Unit
2851
PTA
-120 days