IP Library › Granted Patent US 6,473,161
Granted Patent Utility
US 6,473,161 · Confirmation No. 5141

LITHOGRAPHIC PROJECTION APPARATUS, SUPPORTING ASSEMBLY AND DEVICE MANUFACTURING METHOD

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 Code Description Pages PDF
2001-05-30 TRNA Transmittal of New Application 2 View
2001-05-30 SPEC Specification 28 View
2001-05-30 CLM Claims 5 View
2001-05-30 ABST Abstract 1 View
2001-05-30 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
Patent No.
US 6,473,161
App. No.
09/866,913
Filed
2001-05-30
Granted
2002-10-29
Pub. No.
US20020005939A1
Art Unit
2851
PTA
0 days