IP Library › Granted Patent US 6,576,912
Granted Patent Utility
US 6,576,912 · Confirmation No. 9970

A LITHOGRAPHIC PROJECTION APPARATUS EQUIPPED WITH EXTREME ULTRAVIOLET WINDOW SERVING SIMULTANEOUSLY AS VACUUM WINDOW

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 Code Description Pages PDF
2001-01-03 TRNA Transmittal of New Application 2 View
2001-01-03 A.PE Preliminary Amendment 2 View
2001-01-03 SPEC Specification 13 View
2001-01-03 CLM Claims 4 View
2001-01-03 ABST Abstract 1 View
2001-01-03 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
Patent No.
US 6,576,912
App. No.
09/752,818
Filed
2001-01-03
Granted
2003-06-10
Pub. No.
US20020084428A1
Art Unit
2881
PTA
-72 days