Patent Assignment
Reel/Frame 011820/0932
Assignment of Assignor's Interest
Recorded: 2001-05-21
Received: 2001-05-25
Pages: 2
Assignor
BANINE, VADIM Y.
Executed: 2001-05-17
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
A Lithographic Projection Apparatus Equipped with Extreme Ultraviolet Window Serving Simultaneously as Vacuum Window
Application:
09/752,818 →