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Patent Application Utility
App. No. 09/942,952 · Confirmation No. 8936

LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
09/942,952
Filed
2001-08-31
Granted
2004-03-30
Pub. No.
US20020051123A1
Art Unit
2851
PTA
-31 days