Patent Assignment
Reel/Frame 025927/0721
Assignment of Assignor's Interest
Recorded: 2011-03-09
Pages: 6
Assignor
KONINKLIJKE PHILIPS ELECTRONICS N.V.
Executed: 2010-10-14
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Properties
(6)
Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Lithographic Projection Apparatus, Device Manufacturing Method and Device Manufactured Thereby
Sensor for Lithographic Apparatus and Method of Obtaining Measurements of Lithographic Apparatus
Lithographic Apparatus and Device Manufacturing Method
Lithographic Alignment System and Device Manufacturing Method
Lithographic Apparatus and Device Manufacturing Method
Patent:
42,849 →
Application:
12/153,717 →