Granted Patent
Utility
US 6,597,434
· Confirmation No. 1437
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Inventor:
Antonius J.J. Van Dijsseldonk
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-03-21 | A.PE |
Preliminary Amendment | 16 | View | |
| 2001-03-21 | SPEC |
Specification | 11 | View | |
| 2001-03-21 | CLM |
Claims | 3 | View | |
| 2001-03-21 | ABST |
Abstract | 1 | View | |
| 2001-03-21 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-03-21 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Antonius J.J. Van Dijsseldonk
Hapert, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/75
H10P76/00
G03F7/707
G03F7/70266
G03F7/70283
G03F7/703
Prosecution
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- 277996 P-0176-010-US
- Confirmation No.
- 1437
Foreign Priority
00302420.5
·
2000-03-24
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20010026358A1
- Pub. Date
- 2001-10-04
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-21
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Quick Facts
- Patent No.
- US 6,597,434
- App. No.
- 09/813,135
- Filed
- 2001-03-21
- Granted
- 2003-07-22
- Pub. No.
- US20010026358A1
- Examiner
- KIM, PETER B
- Art Unit
- 2851
- PTA
- 0 days
External Links