IP Library › Granted Patent US 6,597,429
Granted Patent Utility
US 6,597,429 · Confirmation No. 1458

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

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 Code Description Pages PDF
2001-04-12 TRNA Transmittal of New Application 3 View
2001-04-12 SPEC Specification 15 View
2001-04-12 CLM Claims 4 View
2001-04-12 ABST Abstract 1 View
2001-04-12 DRW Drawings-only black and white line drawings 5 View
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Quick Facts
Patent No.
US 6,597,429
App. No.
09/833,077
Filed
2001-04-12
Granted
2003-07-22
Pub. No.
US20020021425A1
Art Unit
2851
PTA
-202 days