Granted Patent
Utility
US 6,597,431
· Confirmation No. 1653
LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD
Inventors
Jozef Petrus Henricus Benschop
Veldhoven, NETHERLANDS
Oscar Fransiscus Jozephus Noordman
Eindhoven, NETHERLANDS
Michael Jozefa Mathijs Renkens
Geleen, NETHERLANDS
Erik Roelof Loopstra
Heeze, NETHERLANDS
Vadim Yevgenyevich Banine
Helmond, NETHERLANDS
Johannes Hubertus Josephina Moors
Helmond, NETHERLANDS
Antonius Johannes Josephus Van Dijsseldonk
Hapert, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/69
H10P76/00
G03F7/70483
G03F7/70058
G03F7/70216
G03F7/708
Prosecution
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 281477 P-0194.010-US
- Confirmation No.
- 1653
Foreign Priority
00202457.8
·
2000-07-10
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020018194A1
- Pub. Date
- 2002-02-14
Patent Term Adjustment
-213days
No related applications found.
from
BANINE, VADIM YEVGENYEVICH,
BENSCHOP, JOZEF PETRUS HENRICUS,
LOOPSTRA, ERIK ROELOF,
MOORS, JOHANNES HUBERTUS JOSEPHINA,
NOORDMAN, OSCAR FRANSISCUS JOZEPHUS,
RENKENS, MICHAEL JOZEFA MATHIJS,
VAN DIJSSELDONK, ANTONIUS JOHANNES JOSEPHUS
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-09
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Quick Facts
- Patent No.
- US 6,597,431
- App. No.
- 09/899,560
- Filed
- 2001-07-06
- Granted
- 2003-07-22
- Pub. No.
- US20020018194A1
- Examiner
- NGUYEN, HUNG
- Art Unit
- 2851
- PTA
- -213 days
External Links