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App. No. 09/942,953 · Confirmation No. 8938

Lithographic projection apparatus, device manufacturing method and device manufactured thereby

Abandoned -- Incomplete Application (Pre-examination)
⬇ PDF
 Code Description Pages PDF
2001-08-31 TRNA Transmittal of New Application 2 View
2001-08-31 SPEC Specification 15 View
2001-08-31 CLM Claims 3 View
2001-08-31 ABST Abstract 1 View
2001-08-31 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
09/942,953
Filed
2001-08-31
Art Unit
2851