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App. No. 09/897,720 · Confirmation No. 9293

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2001-07-03 TRNA Transmittal of New Application 2 View
2001-07-03 SPEC Specification 25 View
2001-07-03 CLM Claims 5 View
2001-07-03 ABST Abstract 1 View
2001-07-03 DRW Drawings-only black and white line drawings 6 View
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Quick Facts
App. No.
09/897,720
Filed
2001-07-03
Granted
2003-06-24
Pub. No.
US20020036763A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
0 days