IP Library › Granted Patent US 6,710,849
Granted Patent Utility
US 6,710,849 · Confirmation No. 9095

METHOD FOR CALIBRATING A LITHOGRAPHIC PROJECTION APPARATUS AND APPARATUS CAPABLE OF APPLYING SUCH A METHOD

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2004-01-30 IFEE Issue Fee Payment (PTO-85B) 2 View
2003-11-13 LET. Miscellaneous Incoming Letter 1 View
2003-11-13 DRW Drawings-only black and white line drawings 2 View
2003-11-03 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-03 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-11-03 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-03 SRFW Search information including classification, databases and other search related notes 1 View
2003-10-25 SRNT Examiner's search strategy and results 3 View
2003-09-04 LET. Miscellaneous Incoming Letter 1 View
2003-09-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-04 SPEC Specification 1 View
2003-09-04 CLM Claims 2 View
2003-09-04 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-05 CTNF Non-Final Rejection 5 View
2003-06-05 892 List of references cited by examiner 1 View
2003-05-30 SRNT Examiner's search strategy and results 1 View
2002-05-14 C.AD Change of Address 1 View
2001-11-20 LET. Miscellaneous Incoming Letter 3 View
2001-11-20 OATH Oath or Declaration filed 1 View
2001-10-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-09-04 TRNA Transmittal of New Application 2 View
2001-09-04 SPEC Specification 13 View
2001-09-04 CLM Claims 2 View
2001-09-04 ABST Abstract 1 View
2001-09-04 DRW Drawings-only black and white line drawings 2 View
2001-09-04 FWCLM Index of Claims 1 View
2001-09-04 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-09-04 SRFW Search information including classification, databases and other search related notes 1 View
2001-09-04 TRNA Transmittal of New Application 2 View
2001-09-04 SPEC Specification 13 View
2001-09-04 CLM Claims 2 View
2001-09-04 ABST Abstract 1 View
2001-09-04 DRW Drawings-only black and white line drawings 2 View
2001-09-04 WCLM Claims Worksheet (PTO-2022) 1 View
2001-09-04 WFEE Fee Worksheet (SB06) 1 View
2001-09-04 FRPR Certified Copy of Foreign Priority Application 22 View
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Quick Facts
Patent No.
US 6,710,849
App. No.
09/944,145
Filed
2001-09-04
Granted
2004-03-23
Pub. No.
US20020026878A1
Examiner
KIM, PETER B
Art Unit
2851
PTA
-120 days