Patent Assignment
Reel/Frame 012315/0030
Assignment of Assignor's Interest
Recorded: 2001-11-20
Received: 2001-11-26
Pages: 2
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
Method for Calibrating a Lithographic Projection Apparatus and Apparatus Capable of Applying Such a Method
Application:
09/944,145 →