IP Library › Granted Patent US 6,710,856
Granted Patent Utility
US 6,710,856 · Confirmation No. 7680

METHOD OF OPERATING A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF MANUFACTURING A DEVICE, AND DEVICE MANUFACTURED THEREBY

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2003-08-21 CTAV Advisory Action (PTOL-303) 2 View
2003-08-12 LET. Miscellaneous Incoming Letter 2 View
2003-08-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2003-01-02 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2003-01-02 REM Applicant Arguments/Remarks Made in an Amendment 9 View
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2002-09-13 892 List of references cited by examiner 1 View
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2001-10-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2001-10-31 REM Applicant Arguments/Remarks Made in an Amendment 1 View
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2001-10-09 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-08-31 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
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2001-08-31 FWCLM Index of Claims 1 View
2001-08-31 TRNA Transmittal of New Application 2 View
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2001-08-31 SPEC Specification 27 View
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2001-08-31 SPEC Specification 27 View
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2001-08-31 DRW Drawings-only black and white line drawings 7 View
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Quick Facts
Patent No.
US 6,710,856
App. No.
09/943,088
Filed
2001-08-31
Granted
2004-03-23
Pub. No.
US20020027648A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
-160 days