IP Library › Granted Patent US 6,721,036
Granted Patent Utility
US 6,721,036 · Confirmation No. 2993

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

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2004-06-21 COCIN Request for Certificate of Correction 2 View
2004-02-06 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-11-10 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-10 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-11-10 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-10 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-01 WFEE Fee Worksheet (SB06) 1 View
2003-11-01 FWCLM Index of Claims 1 View
2003-10-21 RCEX Request for Continued Examination (RCE) 6 View
2003-10-21 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2003-10-08 CTAV Advisory Action (PTOL-303) 3 View
2003-09-02 A.NE Response After Final Action 3 View
2003-09-02 XT/ Extension of Time 2 View
2003-05-01 CTFR Final Rejection 8 View
2003-04-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-04-23 CLM Claims 3 View
2003-04-23 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2002-11-29 CTNF Non-Final Rejection 7 View
2002-11-29 892 List of references cited by examiner 1 View
2002-05-10 C.AD Change of Address 1 View
2001-09-06 LET. Miscellaneous Incoming Letter 3 View
2001-09-06 OATH Oath or Declaration filed 2 View
2001-09-06 DRW Drawings-only black and white line drawings 10 View
2001-09-06 SPEC Specification 17 View
2001-09-06 CLM Claims 3 View
2001-09-06 ABST Abstract 1 View
2001-07-06 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-04-06 TRNA Transmittal of New Application 2 View
2001-04-06 SPEC Specification 18 View
2001-04-06 CLM Claims 3 View
2001-04-06 ABST Abstract 1 View
2001-04-06 DRW Drawings-only black and white line drawings 10 View
2001-04-06 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-04-06 SRFW Search information including classification, databases and other search related notes 1 View
2001-04-06 FWCLM Index of Claims 1 View
2001-04-06 TRNA Transmittal of New Application 2 View
2001-04-06 DRW Drawings-only black and white line drawings 10 View
2001-04-06 SPEC Specification 18 View
2001-04-06 CLM Claims 3 View
2001-04-06 ABST Abstract 1 View
2001-04-06 WFEE Fee Worksheet (SB06) 1 View
2001-04-06 WCLM Claims Worksheet (PTO-2022) 1 View
2001-04-06 FRPR Certified Copy of Foreign Priority Application 34 View
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Quick Facts
Patent No.
US 6,721,036
App. No.
09/827,350
Filed
2001-04-06
Granted
2004-04-13
Pub. No.
US20020039694A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
-159 days