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App. No. 09/988,830 · Confirmation No. 8828

LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD, DEVICE MANUFACTURED THEREBY, CLEANING UNIT AND METHOD OF CLEANING CONTAMINATED OBJECTS

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2004-02-20 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-01-09 LET. Miscellaneous Incoming Letter 1 View
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2003-11-26 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-26 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-11-26 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2003-11-26 CLM Claims 3 View
2003-11-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-11-26 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-14 A.NE Response After Final Action 2 View
2003-11-14 CLM Claims 3 View
2003-11-14 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-07-14 CTFR Final Rejection 10 View
2003-05-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-05-15 SPEC Specification 1 View
2003-05-15 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2003-01-16 CTNF Non-Final Rejection 8 View
2003-01-16 892 List of references cited by examiner 1 View
2003-01-16 1449 List of References cited by applicant and considered by examiner 3 View
2002-12-30 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-09-13 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2002-09-13 SPEC Specification 13 View
2002-09-13 CLM Claims 2 View
2002-09-13 ABST Abstract 1 View
2002-09-13 DRW Drawings-only black and white line drawings 2 View
2002-09-13 FOR Foreign Reference 8 View
2002-05-29 LET. Miscellaneous Incoming Letter 3 View
2002-05-14 C.AD Change of Address 1 View
2002-04-16 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2002-03-15 LET. Miscellaneous Incoming Letter 3 View
2002-03-15 OATH Oath or Declaration filed 2 View
2002-01-17 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-11-19 TRNA Transmittal of New Application 2 View
2001-11-19 SPEC Specification 14 View
2001-11-19 CLM Claims 3 View
2001-11-19 ABST Abstract 1 View
2001-11-19 DRW Drawings-only black and white line drawings 2 View
2001-11-19 FWCLM Index of Claims 1 View
2001-11-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-11-19 SRFW Search information including classification, databases and other search related notes 1 View
2001-11-19 TRNA Transmittal of New Application 2 View
2001-11-19 SPEC Specification 15 View
2001-11-19 CLM Claims 3 View
2001-11-19 ABST Abstract 1 View
2001-11-19 DRW Drawings-only black and white line drawings 2 View
2001-11-19 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
09/988,830
Filed
2001-11-19
Granted
2004-04-20
Pub. No.
US20030095240A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
-163 days