IP Library Patent Application 09893347
Patent Application Utility
App. No. 09/893,347 · Confirmation No. 1165

RADIATION SOURCE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Code Description Pages PDF
2003-10-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-06-28 TRNA Transmittal of New Application 2 View
2001-06-28 SPEC Specification 18 View
2001-06-28 CLM Claims 4 View
2001-06-28 ABST Abstract 1 View
2001-06-28 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
App. No.
09/893,347
Filed
2001-06-28
Granted
2003-12-23
Pub. No.
US20020021430A1
Art Unit
2881
PTA
0 days