Patent Application
Utility
App. No. 09/893,347
· Confirmation No. 1165
RADIATION SOURCE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-28 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-06-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-06-28 | SPEC |
Specification | 18 | View | |
| 2001-06-28 | CLM |
Claims | 4 | View | |
| 2001-06-28 | ABST |
Abstract | 1 | View | |
| 2001-06-28 | DRW |
Drawings-only black and white line drawings | 4 | View |
Inventors
Konstantin Nikolaevitch Koshelev
Troitsk, RUSSIAN FEDERATION
Frederik Bijkerk
Amsterdam, NETHERLANDS
Givi Georgievitch Zukavishvili
Troitsk, RUSSIAN FEDERATION
Evgenii Dmitreevitch Korop
Troitsk, RUSSIAN FEDERATION
Vladimir Vital'evitch Ivanov
Moscow, RUSSIAN FEDERATION
Attorneys & Agents of Record
Classification
USPC
250/492.2
H05G2/007
H10P76/00
H05G2/0035
B82Y10/00
G03F7/70033
Prosecution
- Examiner
- HASHMI, ZIA R
- Art Unit
- 2881
- Customer No.
- 909
- Docket No.
- P 281423 P-0191.010-US
- Confirmation No.
- 1165
Foreign Priority
00202304.2
·
2000-07-03
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020021430A1
- Pub. Date
- 2002-02-21
Patent Term Adjustment
0days
from
KOSHELEV, KONSTANTIN NIKOLAEVITCH,
BIJKERK, FREDERIK,
IVANOV, VLADIMIR VITALEVITCH,
KOROP, EVGENII DMITREVITCH,
ZUKAVISHILI, GIVI GEORGIEVITCH
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-16
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Quick Facts
- App. No.
- 09/893,347
- Filed
- 2001-06-28
- Granted
- 2003-12-23
- Pub. No.
- US20020021430A1
- Examiner
- HASHMI, ZIA R
- Art Unit
- 2881
- PTA
- 0 days
External Links