IP Library › Granted Patent US 6,818,912
Granted Patent Utility
US 6,818,912 · Confirmation No. 6369

RADIATION SOURCE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY

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2004-09-30 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-08-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-13 FWCLM Index of Claims 1 View
2004-08-13 BIB Bibliographic Data Sheet 1 View
2004-08-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-08-13 IMIS Miscellaneous Internal Document 1 View
2004-08-05 DISQ Terminal Disclaimer review decision 1 View
2004-08-03 WFEE Fee Worksheet (SB06) 1 View
2004-07-02 A.NE Response After Final Action 1 View
2004-07-02 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-07-02 DIST Terminal Disclaimer Filed 2 View
2004-07-02 LET. Miscellaneous Incoming Letter 2 View
2004-05-21 CTFR Final Rejection 5 View
2004-05-21 892 List of references cited by examiner 1 View
2004-05-21 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-21 FWCLM Index of Claims 1 View
2004-05-10 WFEE Fee Worksheet (SB06) 1 View
2004-05-10 FWCLM Index of Claims 1 View
2004-04-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-04-26 SPEC Specification 1 View
2004-04-26 CLM Claims 6 View
2004-04-26 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-03-17 CTNF Non-Final Rejection 4 View
2004-03-17 892 List of references cited by examiner 1 View
2004-03-17 1449 List of References cited by applicant and considered by examiner 1 View
2004-03-17 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-17 FWCLM Index of Claims 1 View
2003-11-05 TRNA Transmittal of New Application 3 View
2003-11-05 SPEC Specification 18 View
2003-11-05 CLM Claims 1 View
2003-11-05 ABST Abstract 1 View
2003-11-05 DRW Drawings-only black and white line drawings 4 View
2003-11-05 OATH Oath or Declaration filed 2 View
2003-11-05 ADS Application Data Sheet 3 View
2003-11-05 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-11-05 WFEE Fee Worksheet (SB06) 1 View
2003-11-05 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,818,912
App. No.
10/700,445
Filed
2003-11-05
Granted
2004-11-16
Pub. No.
US20040089819A1
Art Unit
2881
PTA
0 days