Patent Assignment
Reel/Frame 014696/0890
Assignment of Assignor's Interest
Recorded: 2003-11-05
Received: 2003-11-14
Pages: 2
Assignors
KOSHELEV, KONSTANTIN NIKOLAEVITCH
Executed: 2001-09-18
BIJKERK, FREDERIK
Executed: 2001-09-20
IVANOV, VLADIMIR VITAL'EVITCH
Executed: 2001-10-01
KOROP, EVGENIL DMITREEVITCH
Executed: 2001-10-01
ZUKAVISHVILI, GIVI GEORGIEVITCH
Executed: 2001-10-01
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
Radiation Source, Lithographic Apparatus, Device Manufacturing Method, and Device Manufactured Thereby
Application:
10/700,445 →