IP Library › Granted Patent US 6,781,673
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US 6,781,673 · Confirmation No. 8408

MASK HANDLING APPARATUS, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY

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2001-08-23 DRW Drawings-only black and white line drawings 4 View
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Quick Facts
Patent No.
US 6,781,673
App. No.
09/934,698
Filed
2001-08-23
Granted
2004-08-24
Pub. No.
US20020109828A1
Examiner
NGUYEN, HUNG
Art Unit
2851
PTA
-61 days