Granted Patent
Utility
US 6,828,569
· Confirmation No. 8247
LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
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Code | Description | Pages | ||
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| 2004-10-27 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-10-08 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 2 | View | |
| 2004-10-08 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2004-10-08 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2004-08-27 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2004-08-27 | AF/D |
Affidavit-submitted prior to Mar 15, 2013 | 3 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-28 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-28 | ANE.I |
Amendment After Final or under 37CFR 1.312, initialed by the examiner. | 1 | View | |
| 2004-07-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-23 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2004-07-22 | DISQ |
Terminal Disclaimer review decision | 1 | View | |
| 2004-07-02 | A.NE |
Response After Final Action | 2 | View | |
| 2004-07-02 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2004-07-02 | DIST |
Terminal Disclaimer Filed | 3 | View | |
| 2004-04-06 | CTFR |
Final Rejection | 5 | View | |
| 2004-04-06 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-02-20 | FWCLM |
Index of Claims | 1 | View | |
| 2004-01-29 | RCEX |
Request for Continued Examination (RCE) | 2 | View | |
| 2004-01-29 | CLM |
Claims | 1 | View | |
| 2004-01-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2004-01-29 | XT/ |
Extension of Time | 1 | View | |
| 2003-11-17 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2003-10-30 | A.NE |
Response After Final Action | 2 | View | |
| 2003-10-30 | CLM |
Claims | 1 | View | |
| 2003-10-30 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2003-07-30 | CTFR |
Final Rejection | 8 | View | |
| 2003-07-11 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2003-07-11 | SPEC |
Specification | 1 | View | |
| 2003-07-11 | CLM |
Claims | 1 | View | |
| 2003-07-11 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-06-09 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-06-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-06-09 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2003-05-19 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-05-01 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-04-11 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2003-04-08 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-04-08 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-12-31 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-09-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2002-09-13 | FOR |
Foreign Reference | 8 | View | |
| 2002-09-13 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2002-09-13 | SPEC |
Specification | 15 | View | |
| 2002-09-13 | CLM |
Claims | 3 | View | |
| 2002-09-13 | ABST |
Abstract | 1 | View | |
| 2002-04-16 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2002-02-20 | OATH |
Oath or Declaration filed | 3 | View | |
| 2002-02-20 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 3 | View | |
| 2001-11-29 | PEFN |
Pre-Exam Formalities Notice | 1 | View | |
| 2001-11-19 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-19 | SPEC |
Specification | 13 | View | |
| 2001-11-19 | CLM |
Claims | 2 | View | |
| 2001-11-19 | ABST |
Abstract | 1 | View | |
| 2001-11-19 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-19 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2001-11-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2001-11-19 | FWCLM |
Index of Claims | 1 | View | |
| 2001-11-19 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-11-19 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2001-11-19 | SPEC |
Specification | 13 | View | |
| 2001-11-19 | CLM |
Claims | 2 | View | |
| 2001-11-19 | ABST |
Abstract | 1 | View | |
| 2001-11-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2001-11-19 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View |
Inventors
Willem Van Schaik
's-Hertogenbosch, NETHERLANDS
Bastiaan Matthias Mertens
's-Gravenhage, NETHERLANDS
Hans Meiling
Bilthoven, NETHERLANDS
Norbertus Benedictus Koster
Delft, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
250/492.2
G03F7/20
G03F7/70925
G03F7/70883
G03F7/70933
Prosecution
- Examiner
- GURZO, PAUL M
- Art Unit
- 2881
- Customer No.
- 909
- Docket No.
- P 284106 P-0293.000-US
- Confirmation No.
- 8247
Publication
- Pub. No.
- US20030096193A1
- Pub. Date
- 2003-05-22
Patent Term Adjustment
-154days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2002-02-20
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Quick Facts
- Patent No.
- US 6,828,569
- App. No.
- 09/988,391
- Filed
- 2001-11-19
- Granted
- 2004-12-07
- Pub. No.
- US20030096193A1
- Examiner
- GURZO, PAUL M
- Art Unit
- 2881
- PTA
- -154 days
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