Granted Patent
Utility
US 6,563,564
· Confirmation No. 1414
METHOD OF OPERATING AN OPTICAL IMAGING SYSTEM, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD, AND DEVICE MANUFACTURED THEREBY
Inventors
Christianus Gerardus Maria de Mol
Son en Breugel, NETHERLANDS
Thomas Josephus Maria Castenmiller
Eindhoven, NETHERLANDS
Marcel van Dijk
Eindhoven, NETHERLANDS
Franciscus Antonius Chrysogonus Marie Commissaris
Veldhoven, NETHERLANDS
Simon de Groot
Eindhoven, NETHERLANDS
Catharina Johanna Lucia Maria van den Enden
Eindhoven, NETHERLANDS
Attorneys & Agents of Record
Classification
USPC
355/52
G03F7/70216
G03F7/706
G03F7/70891
Prosecution
- Examiner
- ESPLIN, DAVID B
- Art Unit
- 2851
- Customer No.
- 909
- Docket No.
- P 281271 P-0190.010-US
- Confirmation No.
- 1414
Foreign Priority
00305029.1
·
2000-06-14
·
EUROPEAN PATENT OFFICE (EPO)
Publication
- Pub. No.
- US20020036758A1
- Pub. Date
- 2002-03-28
Patent Term Adjustment
-94days
No related applications found.
from
CASTENMILLER, THOMAS JOSEPHUS MARIA,
COMMISSARIS, FRANCISCUS ANTONIUS CHRYSOGONUS MARIE,
DE MOL, CHRISTIANUS GERARDUS MARIA,
GROOT, SIMON,
VAN DEN ENDEN, CATHARINA JOHANNA LUCIA MARIA,
VAN DIJK, MARCEL
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-10-05
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Quick Facts
- Patent No.
- US 6,563,564
- App. No.
- 09/878,182
- Filed
- 2001-06-12
- Granted
- 2003-05-13
- Pub. No.
- US20020036758A1
- Examiner
- ESPLIN, DAVID B
- Art Unit
- 2851
- PTA
- -94 days
External Links